Applications of MEMS sensors in industrial equipment condition sensing and the Internet of Things
DOI:
https://doi.org/10.71451/ISTAER2560Keywords:
MEMS; MEMS sensors; Condition monitoring; Predictive maintenance; Industrial Internet of Things (IIoT)Abstract
This paper systematically studies the integrated application of microelectromechanical systems (MEMS) sensors in industrial equipment condition sensing and the Internet of Things (IoT). The research shows that MEMS sensors, with their advantages of miniaturization, low cost, and low power consumption, effectively overcome the limitations of traditional monitoring technologies in terms of deployment density and economy, laying a solid foundation for building large-scale equipment condition sensing networks. By analyzing multi-dimensional parameters such as vibration, attitude, and pressure, and combining edge computing and data fusion technologies, accurate diagnosis and early warning of the operating status of industrial equipment are achieved. Further research indicates that when MEMS sensors are deeply integrated into the industrial IoT architecture, not only is real-time monitoring of equipment status realized, but the operation and maintenance model is also promoted from reactive maintenance to predictive maintenance, significantly improving equipment reliability, production efficiency, and safety management levels. Although challenges remain in measurement accuracy, environmental adaptability, and standardization, with the deep integration of new materials, new processes, and artificial intelligence technologies, MEMS sensors will play an increasingly important role in building intelligent and adaptive industrial ecosystems, providing key technological support for industrial digital transformation.
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